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arXiv · 2312.05453

Evidence of Gas Phase Nucleation of Nano Diamond in Microwave Plasma Assisted Chemical Vapor Deposition

Tanvi Nikhar·Sergey V. Baryshev
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Abstract

The mechanism of ballas like nano crystalline diamond formation (NCD) still remains elusive, and this work attempts to analyze its formation in the framework of activation energy ($E_\text{a}$) of NCD films grown from H$_\text{2}$/CH$_\text{4}$ plasma in a 2.45 GHz chemical vapor deposition system. The $E_\text{a}$ is calculated using the Arrhenius equation corresponding to the thickness growth rate while using substrate temperature ($\sim1000-1300$ K) in all the calculations. While the calculated values match with the $E_\text{a}$ for nano diamond formation throughout the literature, these values of $\sim$10 kcal/mol are lower compared to $\sim$15 -- 25 kcal/mol for standard single crystal diamond (SCD) formation, concluding thus far, that the energetics and processes involved are different. In this work, To further investigate this, the substrate preparation and sample collection method are modified while keeping the growth parameters constant. Unseeded Si substrates are physically separated from the plasma discharge by a molybdenum plate with a pinhole drilled in it. Small quantities of a sample substance are collected on the substrates. The sample is characterized by electron microscopy and Raman spectroscopy confirming it to be nano diamond, thus, suggesting that nano diamond self nucleates in the plasma and flows to the substrate which acts as a mere collection plate. It is hypothesized then, if nano diamond nucleates in gas phase, gas temperature has to be used in the Arrhenius analysis. The $E_\text{a}$ values for all the nano diamond films are re-calculated using the simulated gas temperature ($\sim1500-2000$ K) obtained from a simple H$_\text{2}$/CH$_\text{4}$ plasma model, giving values within the range characteristic to SCD formation. A unified growth mechanism for NCD and SCD is proposed concluding that the limiting reactions for NCD and SCD formation are the same.

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Tanvi Nikhar, Sergey V. Baryshev. 2023-12-09. Evidence of Gas Phase Nucleation of Nano Diamond in Microwave Plasma Assisted Chemical Vapor Deposition. https://arxiv.org/abs/2312.05453

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