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arXiv · 2312.10180

Smart sensing of the multifunctional properties of magnetron sputtered $MoS_2$ across the amorphous-crystalline transition

Jose L. Ocana-Pujol·Rebecca A. Gallivan·Ramon Camilo Dominguez Ordoñez·Nikolaus Porenta·Arnold Müller·Christof Vockenhuber·Ralph Spolenak·Henning Galinski
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Abstract

Molybdenum disulfide, $MoS_2$, is a next-generation semiconductor and is frequently integrated into emergent optoelectronic technologies based on two-dimensional materials. Here, we present a method that provides direct optical feedback on the thickness and crystallinity of sputter-deposited $MoS_2$ down to the few-layer regime. This smart sensing enables tracking the material's functional properties, such as excitonic response, sheet resistance, and hardness across the amorphous-crystalline transition. To illustrate the potential of such feedback-controlled fabrication, we realized $MoS_2$-based hyperbolic metamaterials (HMM) with controllable optical topological transitions and hardness.

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Jose L. Ocana-Pujol, Rebecca A. Gallivan, Ramon Camilo Dominguez Ordoñez, Nikolaus Porenta, Arnold Müller, Christof Vockenhuber, Ralph Spolenak, Henning Galinski. 2023-12-15. Smart sensing of the multifunctional properties of magnetron sputtered $MoS_2$ across the amorphous-crystalline transition. https://arxiv.org/abs/2312.10180

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