SU-8 meta phenylenediamine conjugated thin film for temperature sensing

Abstract

Polymers, demonstrating distinctive optical properties alongside facile and mastered fabrication methods, have become increasingly important platforms for realizing a variety of nanophotonic devices. Enhancing these materials with additional functions might expand their range of multidisciplinary applications. Here, we demonstrate the temperature sensing potential of SU8-Phenylenediamine (SU8-mPD), which was produced by epoxy amination of the SU-8 polymer. The SU8-mPD properties were examined through a series of molecular structural techniques and optical methods. Thin layers have demonstrated optical emission and absorption in the visible range around 420 and 520 nm respectively alongside a strong thermal responsivity, characterized by the 18 ppm\cdotK-1 expansion coefficient. A photonic chip, comprising a thin 5-10 {\mu}m SU8-mPD layer, encased between parallel silver and/or gold thin film mirrors, has been fabricated. This assembly, when pumped by an external light source, generates a pronounced fluorescent signal which is superimposed with the Fabry-P\'erot (FP) resonant response. The chip undergoes mechanical deformation in response to temperature changes, thereby shifting the FP resonance and encoding temperature information into the fluorescence output spectrum. The time response of the device was estimated to be below 500 msec opening a new avenue for optical sensing using SU8-based polymers. Thermoresponsive resonant structures, encompassing strong tunable fluorescent properties, can further enrich the functionalities of nanophotonic polymer-based platforms.