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arXiv · 2406.13506

Development of Volume Produced Negative Ion Source using a CCRF Discharge

Pawandeep Singh·Swati Dahiya·Avnish Pandey·Yashashri Patil·Shantanu Karkari
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Abstract

This work shows the development of a volume-produced negative ion source that consists of annular parallel plates driven by a 13.56 MHz capacitively coupled radio frequency in a push-pull configuration. This source shows advantages in controlling plasma conditions by varying the pressure, power, and applied axial magnetic field. It is found that the push-pull configuration allows the plasma potential to remain in the range of 20 to 40 Volts. Conversely, the application of a magnetic field helps serves to augment the production of negative ions in the central hollow part of the annular plate. Further, a plausible explanation to the obtained experimental results is presented.

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Pawandeep Singh, Swati Dahiya, Avnish Pandey, Yashashri Patil, Shantanu Karkari. 2024-06-19. Development of Volume Produced Negative Ion Source using a CCRF Discharge. https://arxiv.org/abs/2406.13506

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