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arXiv · 2409.15639

Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy

Yueyun Chen·Rebekah Jin·Yarin Heffes·Brian Zutter·Tristan P. O'Neill·Jared J. Lodico·B. C. Regan·Matthew Mecklenburg
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Abstract

Electron microscopy prevalently uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30-100 eV or 0.01-1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.

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Yueyun Chen, Rebekah Jin, Yarin Heffes, Brian Zutter, Tristan P. O'Neill, Jared J. Lodico, B. C. Regan, Matthew Mecklenburg. 2024-09-24. Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy. https://doi.org/10.1103/t1rs-7kr2

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