Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms

Abstract

One dimensional fluid/electron Monte Carlo simulations of capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms are performed as a function of the number of consecutive harmonics driving frequencies of 13.56 MHz, N (1-3), pressure (200-500 mTorr) and gas mixture (10-90 % admixture of O2 to Ar). The effects of these external parameters on the electron dynamics, and the transport of ions and neutrals are revealed at constant peak-to-peak driving voltage. The electronegativity is found to decline as the number of consecutive harmonics increases and the DC self-bias voltage decreases. Increasing the pressure also leads to a decrease in electronegativity. The combination of a decrease in the mean free path of electrons and the presence of the Electrical Asymmetry Effect (EAE) result in different spatio-temporal distributions of the ionization rate, which lead to a reduction in the amplitude of the DC self-bias at higher pressure. As the admixture of electronegative O2 increases, the electronegativity is enhanced, and the discharge mode changes from an {\alpha}-Drift Ambipolar (DA) hybrid to DA mode. This work focuses on linking these fundamental changes of the plasma physics induced by changing external parameters to process relevant charged particle and neutral fluxes to the electrodes. Particular attention is paid to O(1D) flux, because it is a precursor of deposition. In discharges driven by sawtooth up voltage waveforms, placing the substrate on the grounded electrode and increasing the number of consecutive harmonics, N, can facilitate the deposition process, since the O(1D) flux to the substrate is higher in these scenarios. Moreover, at an O2 admixture of 20%, the O(1D) flux is nearly as high as that at an O2 admixture of 90%, indicating that a higher O(1D) flux can be achieved without excessively increasing the O2 admixture.