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arXiv · 2411.16221

Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits

Hyeong-Soon Jang·Hyungjun Heo·Sangin Kim·Hyeon Hwang·Hansuek Lee·Min-Kyo Seo·Hyounghan Kwon·Sang-Wook Han·Hojoong Jung
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Abstract

We demonstrate efficient edge couplers by fabricating a 3D mode size converter on a lithium niobate-on-insulator photonic platform. The 3D mode size converter is fabricated using an etching process that employs a Si external mask to provide height variation and adjust the width variation through tapering patterns via lithography. The measured edge coupling efficiency with a 3D mode size converter was approximately 1.16 dB/facet for the TE mode and approximately 0.71 dB/facet for the TM mode at a wavelength of 1550 nm.

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Hyeong-Soon Jang, Hyungjun Heo, Sangin Kim, Hyeon Hwang, Hansuek Lee, Min-Kyo Seo, Hyounghan Kwon, Sang-Wook Han, Hojoong Jung. 2024-11-25. Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits. https://arxiv.org/abs/2411.16221

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