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arXiv · 2504.20439

A High-Resolution Transmission Line Model with De-embedding Structure for Ultralow Contact Resistivity Extraction

Xuanyu Jia·Hongxu Liao·Ming Li
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Abstract

In this article, we present a contact resistivity extraction method calibrated using a de-embedding structure, called High-Resolution Transmission Line Model (HR-TLM). HR-TLM has the similar infrastructure with Refined TLM (RTLM) or Refined-Ladder TLM(R-LTLM), but is optimized for calibration methods. Its advantage lies in maintaining low \r{ho}_c extraction accuracy while significantly reducing the impact of structural process errors. According to the error analysis model, we verify that the extraction accuracy of HR-TLM based on R-LTLM can reach 10-9 {\Omega}cm2 at micron scale lithography precision.

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Xuanyu Jia, Hongxu Liao, Ming Li. 2025-04-29. A High-Resolution Transmission Line Model with De-embedding Structure for Ultralow Contact Resistivity Extraction. https://arxiv.org/abs/2504.20439

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