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arXiv · 2506.11198

Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies

Andrea Corazza·Silvia Ruffieux·Yuchun Zhu·Claudio A. Jaramillo Concha·Yannik Fontana·Christophe Galland·Richard J. Warburton·Patrick Maletinsky
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Abstract

Quantum devices based on optically addressable spin qubits in diamond are promising platforms for quantum technologies such as quantum sensing and communication. Nano- and microstructuring of the diamond crystal is essential to enhance device performance, yet fabrication remains challenging and often involves trade-offs in surface quality, aspect ratio, device size, and uniformity. We tackle this hurdle with an approach producing millimeter-scale, thin (down to 70 nm) and highly parallel (< 0.35 nm/$\mathrm{\mu m}$}) membranes from single-crystal diamond. The membranes remain contamination-free and possess atomically smooth surfaces ($\mathrm{R_q}$ < 200 pm) as required by state-of-the-art quantum applications. We demonstrate the benefits and versatility of our method by fabricating large fields of free-standing and homogeneous photonic nano- and microstructures. Leveraging a refined photolithography-based strategy, our method offers enhanced scalability and produces robust structures suitable for direct use, while remaining compatible with heterogeneous integration through pick-and-place transfer techniques.

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Andrea Corazza, Silvia Ruffieux, Yuchun Zhu, Claudio A. Jaramillo Concha, Yannik Fontana, Christophe Galland, Richard J. Warburton, Patrick Maletinsky. 2025-06-12. Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies. https://doi.org/10.1021/acs.nanolett.5c03083

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