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arXiv · 2506.21147

Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces

Fedor Kovalev·Mariusz Martyniuk·Andrey Miroshnichenko·Ilya Shadrivov
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Abstract

This work presents a novel approach to create and dynamically control quasi-Bound States in the Continuum (BIC) resonances through the hybridization of 1D and 2D metasurfaces using micro-electromechanical systems (MEMS). By introducing out-of-plane symmetry breaking through a silicon MEMS membrane positioned above a 1D silicon metasurface, the quasi-BIC resonance's central wavelength and quality factor are precisely tuned. The proposed design achieves ultranarrow resonance linewidths with the spectral tuning range exceeding 60 nm while maintaining a constant quality factor. This tuning capability, realized through both horizontal displacement within a 1D metasurface and vertical MEMS membrane movement, offers a new degree of freedom for manipulating quasi-BIC resonances. The proposed hybridization of 2D and 1D metasurfaces using MEMS mechanism provides a practical route to dynamic modulation of transmission resonance characteristics, making it a promising candidate for tunable filters, spectroscopy, imaging, and sensing applications.

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Fedor Kovalev, Mariusz Martyniuk, Andrey Miroshnichenko, Ilya Shadrivov. 2025-06-26. Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces. https://arxiv.org/abs/2506.21147

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