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arXiv · 2509.04728

Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

Rui-Ji Tang·Shu-Xia Zhao·Yu Tian
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Abstract

In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude.

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Rui-Ji Tang, Shu-Xia Zhao, Yu Tian. 2025-09-05. Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation. https://arxiv.org/abs/2509.04728

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