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arXiv · 2510.07123

Multi-NA Metalens Array for Compact High-NA Microscopy

Alireza Khalilian·Jie Fan·Mehdi Sh. Yeganeh·Joe Lo·Yasha Yi
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Abstract

We demonstrate a CMOS-compatible silicon-rich nitride metalens array for visible microscopy at 660 nm. Three co-planar elements provide numerical apertures of 0.54, 0.92, and 0.97, enabling within-sample NA benchmarking without objective swaps. Imaging of annular cell monolayers labeled in the AF647 ZO-1 channel shows progressive sharpening of junctional edges and reduced blur with increasing NA, consistent with diffraction-limited scaling. The compact, planar platform supports direct integration with image sensors, offering a practical route to high-NA fluorescence bioimaging in space-constrained, low-cost systems.

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Alireza Khalilian, Jie Fan, Mehdi Sh. Yeganeh, Joe Lo, Yasha Yi. 2025-10-08. Multi-NA Metalens Array for Compact High-NA Microscopy. https://arxiv.org/abs/2510.07123

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