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arXiv · 2601.15776

Coherent Mode Decoupling: A Versatile Framework for High-Throughput Partially Coherent Light Transport

Han Xu·Ming Li·Shuo Wang·Zhe Ren·Peng Liu·Yi Zhang·Yuhui Dong·Liang Zhou
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Abstract

Accurate and efficient wave-optics simulation of partially coherent light transport systems is critical for the design of advanced optical systems, ranging from computational lithography to diffraction-limited storage rings (DLSR). However, traditional approaches based on Coherent Mode Decomposition suffer from high computational costs due to the propagating massive sets of two-dimensional modes. In this paper, we propose the Coherent Mode Decoupling (CMDC) algorithm, a high-throughput computational framework designed to accelerate these simulations by orders of magnitude without compromising physical fidelity. The method factorizes 2D modes into efficient one-dimensional (1D) components, while crucially incorporating a subspace compression strategy to capture non-separable coupling effects. We demonstrated the generality and robustness of this framework in applications ranging from computational lithography to coherent beamlines of DLSR.

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Han Xu, Ming Li, Shuo Wang, Zhe Ren, Peng Liu, Yi Zhang, Yuhui Dong, Liang Zhou. 2026-01-22. Coherent Mode Decoupling: A Versatile Framework for High-Throughput Partially Coherent Light Transport. https://arxiv.org/abs/2601.15776

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