Dynamical Simulation of On-axis Transmission Kikuchi and Spot Diffraction Patterns, Based on Accurate Diffraction Geometry Calibration

Abstract

Transmission Kikuchi diffraction in the scanning electron microscope has gained popularity as a materials characterization technique for its high throughput and nanometer-level spatial resolution. While conventional diffraction pattern analysis routines focus on Kikuchi bands on the diffraction patterns, the full physical picture of electron scattering and diffraction pattern formation is more complex. Analysis that accounts for additional diffraction features such as diffraction spots and excess-deficiency effects should provide more robust and accurate indexing, if they can be incorporated in pattern indexing or simulation routines. A more accurate understanding of their physics of formation and geometry is required to enable this change. In this work, we demonstrate geometric and full contrast dynamical simulation of on-axis transmission Kikuchi patterns, based on experimental patterns captured using a modular, direct electron detector-based set-up in the scanning electron microscope. First, a diffraction geometry calibration routine is proposed based on the electron channeling pattern of the direct electron detector. This allows us to accurately account for the position of diffraction spots in both geometric and dynamical simulations with good agreement with experimental patterns. Further, by introducing appropriate weight factors, simulation of incoherent diffuse intensity, and calculation of the energy spectra of diffracted electrons, simulated patterns can be obtained which accurately capture the many diffraction features on experimental patterns. Workflows and findings of this work can be used to improve pattern indexing routines, as well as the understanding of the physical processes in the formation of on-axis transmission Kikuchi patterns.