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arXiv · 2603.26654

Silicon Photonic Beam Steerer Based on Metalens Focal Plane Array

Chung-Yu Hsu·Ping-Yen Hsieh·Hsun-Sung Chiu·Li-Jun Tung·Chieh-Chih Yu·Ko-Chi Chen·Yu-Heng Hong·Hao-Chung Kuo·Chi-Wai Chow·You-Chia Chang
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Abstract

Focal plane arrays (FPAs) promise robust solid-state beam steering for LiDAR and free-space optical communications. However, the need for external collimation lenses hinders chip-scale compactness. Discrete switching between FPA elements further introduces blind spots and limits the number of resolvable points, restricting applications that require continuous tracking. Here, we demonstrate a silicon photonic beam steerer based on a metalens FPA that monolithically integrates the collimation lens on-chip. Thermo-optic prisms enable continuous fine-tuning, eliminating blind spots and tripling the number of resolvable points. Continuous steering over a 62{\deg} field of view is achieved while maintaining high beam quality, with an average sidelobe suppression ratio of 19 dB.

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Chung-Yu Hsu, Ping-Yen Hsieh, Hsun-Sung Chiu, Li-Jun Tung, Chieh-Chih Yu, Ko-Chi Chen, Yu-Heng Hong, Hao-Chung Kuo, Chi-Wai Chow, You-Chia Chang. 2026-03-27. Silicon Photonic Beam Steerer Based on Metalens Focal Plane Array. https://arxiv.org/abs/2603.26654

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