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arXiv · 2609.21866

Morphology-Aware Ambiguity Learning for Wafer Defect Decision Support

Seungjun Chu·Seokhyun Chung
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Abstract

Wafer map defect recognition is commonly formulated as a fixed-taxonomy classification problem that assigns each wafer to a single defect class. However, some wafers exhibit morphologies near class boundaries, for which forcing a single prediction may be less informative than providing plausible diagnostic alternatives. This paper proposes a morphology-aware ambiguity learning framework that supports three diagnostic actions: automatic single-class diagnosis, assisted diagnosis with two plausible defect classes, and full review. Using the radial, angular, and geometric characteristics of training wafer maps, the framework constructs a class-level ambiguity matrix representing defect-class pairs with similar morphology and plausible diagnostic alternatives. It guides the model to learn plausible alternative classes rather than treating all incorrect classes equally. During inference, the matrix determines whether an uncertain prediction can be represented by a meaningful two-class diagnostic set or should be escalated for full review. Experiments on WM-811K show that the proposed framework outperforms conventional approaches in defect recognition and diagnostic decision support, providing meaningful two-class alternatives while reserving full review for cases with unresolved ambiguity. Illustrative cost analyses further show the potential cost advantage of the proposed routing strategy. The diagnostic behavior of the framework remains consistent across different backbone architectures.

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Seungjun Chu, Seokhyun Chung. 2026-09-18. Morphology-Aware Ambiguity Learning for Wafer Defect Decision Support. https://arxiv.org/abs/2609.21866

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