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Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions

D. Ghose·P. Karmakar
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Abstract

The phenomenon of potential sputtering of ultra-thin Pt films due to impact of 20 keV highly charged $Ar^{q+}$ (q = 3 - 8) ions has been investigated. The results show enhanced erosion of the Pt film with the increase of potential energy of the Ar projectile.

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D. Ghose, P. Karmakar. 2002-04-10. Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions. https://doi.org/10.1016/s0168-583x(03)01743-9

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