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A Percolative Model of Soft Breakdown in Ultrathin Oxides

C. Pennetta·L. Reggiani·Gy. Trefan
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Abstract

The degradation of ultrathin oxide layers in the presence of a stress voltage is modeled in terms of two antagonist percolation processes taking place in a random resistor network. The resistance and leakage current fluctuations are studied by MonteCarlo simulations for voltages below the breakdown threshold. An increase of excess noise together with a noticeable non-Gaussian behavior is found in the pre-breakdown regime in agreement with experimental results.

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C. Pennetta, L. Reggiani, Gy. Trefan. 2002-04-27. A Percolative Model of Soft Breakdown in Ultrathin Oxides. https://doi.org/10.1016/s0921-4526(01)01408-9

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