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Ion beam sputtering induced ripple formation in thin metal films

P. Karmakar·D. Ghose
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Abstract

We have observed the formation of ripples in a number of thin metal films, e.g. Au, Pt, Ag, Cu and Co under Ar^{+} ion beam sputtering at grazing incidence. The structures are found to be quite stable under ambient conditions. The results show that the ripple formation in polycrystalline metallic films relies on the erosion-induced surface instability similar to that in amorphous materials.

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P. Karmakar, D. Ghose. 2003-11-13. Ion beam sputtering induced ripple formation in thin metal films. https://doi.org/10.1016/j.susc.2004.02.020

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