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Ultra narrow AuPd and Al wires

Fabio Altomare·Albert M. Chang·Michael R. Melloch·Yuguang Hong·Charles W. Tu
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Abstract

In this letter we discuss a novel and versatile template technique aimed to the fabrication of sub-10 nm wide wires. Using this technique, we have successfully measured AuPd wires, 12 nm wide and as long as 20 $μ$m. Even materials that form a strong superficial oxide, and thus not suited to be used in combination with other techniques, can be successfully employed. In particular we have measured Al wires, with lateral width smaller or comparable to 10 nm, and length exceeding 10 $μ$m.

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Fabio Altomare, Albert M. Chang, Michael R. Melloch, Yuguang Hong, Charles W. Tu. 2007-03-02. Ultra narrow AuPd and Al wires. https://doi.org/10.1063/1.1905806

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