arXiv · cond-mat/0412537
Carbon Nanotubes for Interconnect Applications
Abstract
We briefly review the status of the application of carbon nanotubes (CNTs) for future interconnects and present results concerning possible integration schemes. Growth of single nanotubes at lithographically defined locations (vias) has been achieved which is a prerequisite for the use of CNTs as future interconnects. For the 20 nm node, a current density of 5 10^8 A/cm^2 and a resistance of 7.8 kOhm could be achieved for a single multi-walled CNT vertical interconnect.
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Franz Kreupl, Andrew P. Graham, Maik Liebau, Georg S. Duesberg, Robert Seidel, Eugen Unger. 2004-12-20. Carbon Nanotubes for Interconnect Applications. https://arxiv.org/abs/cond-mat/0412537
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