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High Throughput Oxide Lattice Engineering by Parallel Laser Molecular Beam Epitaxy and Concurrent X-ray Diffraction

M. Ohtani·M. Lippmaa·T. Ohnishi·M. Kawasaki
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Abstract

A novel laser molecular beam epitaxy (LMBE) system for the fabrication of atomically controlled oxides superlattices and an x-ray diffractometer that measures spatially-resolved x-ray diffraction spectra have been developed based on the concept of combinatorial methodology. The LMBE chamber has two moving masks, an automated target stage, a substrate heating laser, and an in-situ scanning reflection high-energy electron diffraction system. The x-ray diffractometer with a curved monochromator and two-dimensional detector is used for rapid concurrent x-ray diffraction intensity mapping with the two axes of the detector corresponding to the diffraction angle and a position in the sample.

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M. Ohtani, M. Lippmaa, T. Ohnishi, M. Kawasaki. 2005-04-14. High Throughput Oxide Lattice Engineering by Parallel Laser Molecular Beam Epitaxy and Concurrent X-ray Diffraction. https://doi.org/10.1063/1.1926927

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