On the Casimir effect in the microelectromechanical systems MEMS

Janina Marciak-Kozlowska; Miroslaw Kozlowski

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On the Casimir effect in the microelectromechanical systems MEMS

Janina Marciak-Kozlowska·Miroslaw Kozlowski

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Abstract

In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect.

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Janina Marciak-Kozlowska, Miroslaw Kozlowski. 2005-06-09. On the Casimir effect in the microelectromechanical systems MEMS. https://arxiv.org/abs/cond-mat/0506226

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