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Kinetic Monte Carlo simulation of the nitridation of the GaAs (100) surfaces

A. P. Castro·H. W. Leite Alves
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Abstract

We present, in this work, our preliminary results of a systematic theoretical study of the adsorption of N over As-terminated GaAs (100) (2$\times$1) surfaces. We analyzed the changes in the bond-lenghts, bond-angles and the energetics involved before and after deposition. Our results show that the N-atoms will prefer the unoccupied sites of the surface, close to the As dimer. The presence of the N pushes the As dimer out of the surface, leading to the anion exchange between the N and As atoms. Based on our results, we discussed about the kinetics of the N islands formation during epitaxial growth of the III-Nitrides.

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A. P. Castro, H. W. Leite Alves. 2006-03-05. Kinetic Monte Carlo simulation of the nitridation of the GaAs (100) surfaces. https://doi.org/10.1590/s0103-97332006000300019

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