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Fingerprint of super-interdiffusion: anomalous intermixing in Pt/Ti

P. Süle·M. Menyhárd
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Abstract

The ion-sputtering induced transient enhanced intermixing has been studied by molecular dynamics (MD) simulations in Pt/Ti and its anomalous nature has been explained as a superdiffusive transient enhanced interdiffusion. We find ballistic mixing and a robust mass effect in Pt/Ti. The sum of the square of atomic displacements ($ $) asymptotically grows nonlinearily and scales as $N^2$ and $\sim t^2$, where $N$ and $t$ are the ion-number fluence and the time of ion-sputtering, respectively. This anomalous behavior explains the high diffusity tail in the concentration profile obtained by Auger electron spectroscopy depth profiling (AES-DP) analysis in Pt/Ti/Si substrate (Pt/Ti) multilayer. In Ta/Ti/Pt/Si multilayer we find a linear time scaling of $ \propto t$ at the Ti/Pt interface indicating the suppression of superdiffusive features. We propose a qualitative explanation based on the accelerative effect of nonlinear forces provbided by the anharmonic host lattice.

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P. Süle, M. Menyhárd. 2006-10-25. Fingerprint of super-interdiffusion: anomalous intermixing in Pt/Ti. https://arxiv.org/abs/cond-mat/0605566

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