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Self - Organized Si Dots On Ge Substrates

D. Pachinger·H. Lichtenberger und F. Schaeffler
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Abstract

The epitaxial growth conditions for silicon on germanium substrates were investigated as a function of growth temperature and monolayer coverage. Island formation was observed for the hole studied temperature range, although strong alloying with the substrate occurred for the highest temperatures. Carbon pre-deposition offers suitable nucleation centers for the Si island and reduction of alloying. pre-structured Ge substrates were prepared to enhance islanding and to achieve ordering.

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D. Pachinger, H. Lichtenberger und F. Schaeffler. 2006-08-30. Self - Organized Si Dots On Ge Substrates. https://doi.org/10.1063/1.2729783

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