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The effect of a modulated flux on the growth of thin films

Pablo Jensen·Bernd Niemeyer
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Abstract

Thin films are usually obtained by depositing atoms with a continuous flux. We show that using a chopped flux changes the growth and the morphology of the film. A simple scaling analysis predicts how the island densities change as a function of the frequency of the chopped flux in simple cases where aggregation is irreversible. These predictions are confirmed by computer simulations. We show that the model can be used to obtain information on the diffusion or the evaporation of the adatoms. The model is also useful to understand the growth of thin films prepared by pulsed sources.

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Pablo Jensen, Bernd Niemeyer. 1997-11-14. The effect of a modulated flux on the growth of thin films. https://doi.org/10.1016/s0039-6028(97)00254-9

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