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Surface Resistance Imaging with a Scanning Near-Field Microwave Microscope

D. E. Steinhauer·C. P. Vlahacos·S. K. Dutta·F. C. Wellstood·Steven M. Anlage
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Abstract

We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as one parts in 50000 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system.

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D. E. Steinhauer, C. P. Vlahacos, S. K. Dutta, F. C. Wellstood, Steven M. Anlage. 1997-12-12. Surface Resistance Imaging with a Scanning Near-Field Microwave Microscope. https://doi.org/10.1063/1.120020

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