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Quantitative topographic imaging using a near-field scanning microwave microscope

C. P. Vlahacos·D. E. Steinhauer·S. K. Dutta·B. J. Feenstra·Steven M. Anlage·F. C. Wellstood
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Abstract

We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system's resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows for a height discrimination of about 55 nm at a separation of 30 microns. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations.

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C. P. Vlahacos, D. E. Steinhauer, S. K. Dutta, B. J. Feenstra, Steven M. Anlage, F. C. Wellstood. 1998-02-12. Quantitative topographic imaging using a near-field scanning microwave microscope. https://doi.org/10.1063/1.121182

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