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Evaporation and Step Edge Diffusion in MBE

S. Schinzer·M. Sokolowski·M. Biehl·W. Kinzel
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Abstract

Using kinetic Monte-Carlo simulations of a Solid-on-Solid model we investigate the influence of step edge diffusion (SED) and evaporation on Molecular Beam Epitaxy (MBE). Based on these investigations we propose two strategies to optimize MBE-growth. The strategies are applicable in different growth regimes: during layer-by-layer growth one can reduce the desorption rate using a pulsed flux. In three-dimensional (3D) growth the SED can help to grow large, smooth structures. For this purpose the flux has to be reduced with time according to a power law.

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S. Schinzer, M. Sokolowski, M. Biehl, W. Kinzel. 1998-10-01. Evaporation and Step Edge Diffusion in MBE. https://doi.org/10.1016/s0022-0248(98)01293-7

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