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Unconventional MBE Strategies from Computer Simulations for Optimized Growth Conditions

S. Schinzer·M. Sokolowski·M. Biehl·W. Kinzel
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Abstract

We investigate the influence of step edge diffusion (SED) and desorption on Molecular Beam Epitaxy (MBE) using kinetic Monte-Carlo simulations of the solid-on-solid (SOS) model. Based on these investigations we propose two strategies to optimize MBE growth. The strategies are applicable in different growth regimes: During layer-by-layer growth one can exploit the presence of desorption in order to achieve smooth surfaces. By additional short high flux pulses of particles one can increase the growth rate and assist layer-by-layer growth. If, however, mounds are formed (non-layer-by-layer growth) the SED can be used to control size and shape of the three-dimensional structures. By controlled reduction of the flux with time we achieve a fast coarsening together with smooth step edges.

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S. Schinzer, M. Sokolowski, M. Biehl, W. Kinzel. 1999-03-19. Unconventional MBE Strategies from Computer Simulations for Optimized Growth Conditions. https://doi.org/10.1103/physrevb.60.2893

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