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Pulsed-laser beam profiling for deposition of high-T_c YBCO films

Evgeny V. Pechen
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Abstract

A special shaping of YAG:Nd^{3+} laser beam profile has been found to improve homogeneity and T_c of YBa_2Cu_3O_{7-δ} films being deposited by the pulsed laser. Targets of a considerably non-stoichiometric composition and substrates of slanting cuts have turned to be necessary for the high-quality film growing. Multiple droplets and solid particles ejected from the target surface by the infrared radiation are removed successfuly from the laser-induced plasma by use of a velocity filter.

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Evgeny V. Pechen. 1999-06-07. Pulsed-laser beam profiling for deposition of high-T_c YBCO films. https://arxiv.org/abs/cond-mat/9906040

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