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UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT

K. Fahy·P. Dunne·L. Mckinney·G. O'sullivan·E. Sokell·J. White·A. Aguilar·J. M. Pomeroy·J. N. Tan·B. Blagojevic·E. -O. Lebigot·J. D. Gillaspy
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Abstract

Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with that from 4d-4f and 4p-4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of five could be gained in photon yield using the UTA rather than the 4d-5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon as an EUVL source material.

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K. Fahy, P. Dunne, L. Mckinney, G. O'sullivan, E. Sokell, J. White, A. Aguilar, J. M. Pomeroy, J. N. Tan, B. Blagojevic, E. -O. Lebigot, J. D. Gillaspy. 2005-07-06. UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT. https://doi.org/10.1088/0022-3727/37/23/003

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