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Alberto Mistroni

Publications and source records attributed to Alberto Mistroni.

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Mobility Enhancement in Si/SiGe Quantum Well Enabled by a Buried Si Layer Trapping Oxygen Impurities

Reducing disorder in undoped Si/SiGe field-effect heterostructures remains an important materials challenge for scalable quantum devices, particularly electron spin qubits. Background impurities such as oxygen have been identified as mobility-limiting, yet practical heterostructure-design strategies for suppressing their incorporation remain underexplored, and their influence across different transport regimes is not fully established. Here, we demonstrate a simple route to oxygen reduction and mobility enhancement in Si/SiGe quantum-well heterostructures grown by reduced-pressure chemical vapor deposition (RP-CVD) on 200 mm Si(100) substrates through the introduction of a thin, electrically passive buried Si layer within the lower SiGe barrier. Secondary-ion mass spectrometry shows that the buried Si layer reproducibly reduces the oxygen background in the subsequently grown SiGe by approximately a factor of five, without modifying the active quantum-well region. Density- and temperature-dependent magnetotransport measurements further show that this reduction increases the electron mobility, while leaving the percolation density and density-dependent mobility scaling largely unchanged. Upon cooling to 0.3 K, both high- and low-oxygen devices exhibit similar density-dependent fractional mobility enhancements, indicating that the reduced oxygen background improves momentum relaxation without substantially altering the dominant low-density disorder landscape. These results establish the buried Si layer as a straightforward and process-compatible heterostructure-design element for reducing oxygen incorporation and improving transport in 200 mm CVD-grown Si/SiGe quantum-device materials.

cond-mat.mes-hall

Disorder signatures emerging at millikelvin temperatures in Si/SiGe field-effect stacks

The performance and scalability of electron spin qubits based on gate-defined quantum-dots in undoped Si/SiGe field-effect stacks remain constrained by disorder originating from the gate stack. Its coupling to the quantum well can be reduced by increasing the Si quantum well depth, while electrostatic charge history, for example through interface-trap filling, can further modify the effective disorder landscape. Although such disorder is commonly benchmarked through mobility measurements using magnetotransport and Hall bar devices, dedicated investigations at millikelvin temperatures relevant for quantum-dot operation remain limited. Here, we use temperature-dependent magnetotransport on Hall bar shaped field-effect transistors to investigate how mobility-based disorder signatures depend on quantum-well depth and charge history from \(1.5~\mathrm{K}\) down to the millikelvin regime. We show that magnetotransport characterization at \(1.5~\mathrm{K}\) captures the dominant mobility improvement associated with reduced dielectric-interface coupling, but can underestimate disorder differences that emerge at millikelvin temperatures, particularly in the low-density regime. Our results therefore highlight that millikelvin magnetotransport characterization of Hall bar devices can provide additional insight for optimizing Si/SiGe field-effect stacks, particularly in the context of gate-defined quantum dot spin qubits.

cond-mat.mes-hall

High yield, low disorder Si/SiGe heterostructures for spin qubit devices manufactured in a BiCMOS pilot line

The prospect of achieving fault-tolerant quantum computing with semiconductor spin qubits in Si/SiGe heterostructures relies on the integration of a large number of identical devices, a feat achievable through a scalable (Bi)CMOS manufacturing approach. To this end, both the gate stack and the Si/SiGe heterostructure must be of high quality, exhibiting uniformity across the wafer and consistent performance across multiple fabrication runs. Here, we report a comprehensive investigation of Si/SiGe heterostructures and gate stacks, fabricated in an industry-standard 200 mm BiCMOS pilot line. We evaluate the homogeneity and reproducibility by probing the properties of the two-dimensional electron gas (2DEG) in the shallow silicon quantum well through magnetotransport characterization of Hall bar-shaped field-effect transistors at 1.5 K. Across all the probed wafers, we observe minimal variation of the 2DEG properties, with an average maximum mobility of $(4.25\pm0.17)\times 10^{5}$ cm$^{2}$/Vs and low percolation carrier density of $(5.9\pm0.18)\times 10^{10}$ cm$^{-2}$ evidencing low disorder potential in the quantum well. The observed narrow statistical distribution of the transport properties highlights the reproducibility and the stability of the fabrication process. Furthermore, wafer-scale characterization of a selected individual wafer evidenced the homogeneity of the device performances across the wafer area. Based on these findings, we conclude that our material and processes provide a suitable platform for the development of scalable, Si/SiGe-based quantum devices.

cond-mat.mes-hall