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Alessio Miranda

Publications and source records attributed to Alessio Miranda.

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Plasma Etch Process Optimization for Photonic-Grade Diamond-on-Insulator Substrates and Thickness Evaluation using Colorimetry

Diamond color-center qubits integrated with photonic circuits can be initialized, manipulated, entangled, and read individually with high fidelity, making them attractive for large-scale modular quantum computers, quantum networks, and distributed quantum sensing. However, the limited size of heteroepitaxially grown single-crystal diamond (SCD) and photonic-grade diamond-on-insulator (DOI) substrates remains a challenge for integration with existing manufacturing processes. Here, we develop a plasma etch recipe to thin direct-bonded (100) SCD membranes (<50 $\mu$m) into large-area, thin-film DOI substrates, and demonstrate free-standing photonic chiplets fabricated from the resulting DOI. The ICP-RIE recipe preserves diamond bonding, provides sufficient micromasking and surface-quality control, and enables thin-film DOI manufacture. We thin a 10 $\mu$m diamond plate bonded to SiO$_2$/Si and obtain a photonic-grade DOI substrate with diamond thickness $\leq$300 nm. The DOI film is around 300 nm thick over 0.5 $\times$ 0.5 mm$^2$, with surface roughness < 0.5 nm, while the bonding interface remains intact. Diamond photonic chiplets are fabricated on this DOI substrate using a standard two-step lithography process, without complex thin-film transfer, under-etching, or pedestal formation. We also present a colorimetric study of diamond visibility on SiO$_2$ and quantify color differences across thicknesses in common colorimetric spaces. This analysis enables automatic diamond-thickness extrapolation from standard optical microscope images with 5 nm resolution, in good agreement with white-light interferometry (WLI) measurements. The DOI substrate and colorimetric thickness-evaluation method provide an effective fabrication platform and reliable validation route for scalable manufacturing of diamond nanophotonic devices, opening a path toward large-scale integrated quantum systems.

physics.optics

Cross Waveguide Design for Color-Centers in Diamond for Photonic Quantum Computing

Color centers in diamond are a promising platform for quantum computing applications because of their optical and spin properties. However, diamond presents some technological challenges that limit its use in complex or large photonic circuits. To mitigate these limitations, it is technically effective to separate the smallest possible diamond photonic structures or chiplet containing the color center(s) from the rest of the circuit, which is fabricated on another material platform, and then heterogeneously integrate them. Considering efficient excitation and photon collection from waveguide-coupled color centers, we design a cross waveguide as the primary component of our chiplet to access the color centers, channeling excitation and emitted photons into different waveguides, and connecting the structure to the other components of the photonic circuit. The chiplet containing the cross waveguide and supporting structures requires careful optimization of each subcomponent. The receptor's design is also critical for optimal signal transmission. In this paper, we develop a simple but efficient methodology to optimize the main components constituting both the chiplet and the receptor for their synergistic operation. The designed structure has an excitation-to-emission conversion of more than 5.4%, crosstalk of less than -40 dB, a working bandwidth of 160 nm, fabrication feasibility and tolerance within the limits of modern nanofabrication, and a mechanical solid structure with a footprint of less than 2000 $\mu$m

physics.optics

Single site-controlled inverted pyramidal InGaAs QD-nanocavity operating at the onset of the strong coupling regime

Precise positioning of single site-controlled inverted pyramidal InGaAs QD at the antinode of a GaAs photonic crystal cavity with nanometer-scale accuracy holds unique advantages compared to self-assembled QDs and offers great promise for practical on-chip photonic quantum information processing. However, the strong coupling regime in this geometry has not yet been achieved due to the low cavity Q-factor based on the (111)B-oriented membrane structures. Here, we reveal the onset of phonon-mediated coherent exciton-photon interaction on our tailored single site-controlled InGaAs QD - photonic crystal cavity. Our results present a Rabi-like oscillation of luminescence intensity between excitonic and photonic components correlated with their energy splitting pronounced at small detuning. Such Rabi-like oscillation is well reproduced by modeling the coherent exchange of the exciton-photon population. The modeling further reveals an oscillatory two-time covariance at QD-cavity resonance, which indicates that the system operates at the onset of the strong coupling regime. Moreover, by using the cavity mode as a probe of the virtual state of the QD induced by phonon scattering, it reveals an increase in phonon scattering rates near the QD-cavity resonance and asymmetric phonon emission and absorption rate even around 50 K.

cond-mat.mes-hall

Exciton-photon complexes and dynamics in the concurrent strong-weak coupling regime of singular site-controlled cavity quantum electrodynamics

We investigate the exciton complexes photoluminescence, dynamics and photon statistics in the concurrent strong weak coupling regime in our unique site controlled singular inverted pyramidal InGaAs/GaAs quantum dots photonic crystal cavities platform. Different from a clear boundary between strong and weak QD cavity coupling, we demonstrate the strong and weak coupling can coexist dynamically, as a form of intermediate regime mediated by phonon scattering. The detuning dependent microphotoluminescence spectrum reveals concurrence of exciton cavity polariton mode avoided crossing, as a signature of Rabi doublet of the strong coupled system, the blue shifting of coupled exciton cavity mode energy near zero detuning ascribed to the formation of collective states mediated by phonon assisted coupling, and their partial out of synchronization linewidth narrowing linked to their mixed behavior. By detailing the optical features of strongly confined exciton-photon complexes and the quantum statistics of coupled cavity photons, we reveal the dynamics and antibunching/bunching photon statistical signatures of the concurrent strong weak intermediate coupled system at near zero-detuning. This study suggests our device has potential for new and subtle cavity quantum electrodynamical phenomena, cavity enhanced indistinguishable single photon generation, and cluster state generation via the exciton-photon complexes for quantum networks.

cond-mat.mes-hall

Nanolithographic templates using diblock copolymer films on chemically heterogeneous substrates

The orientation of the lamellae formed by the phase separation of symmetric diblock copolymer thin films is strongly affected by the wetting properties of the polymer blocks with respect to the substrate. On bare silicon wafers the lamellae of polystyrene-b-polymethylmethacrylate thin films tend to order parallel to the wafer surface, with the polymethylmethacrylate block preferentially wetting silicon. We have developed a methodology for inducing the arrangement of lamellae perpendicular to the substrate by using chemically modified substrates. This is done by chemisorbing a self-assembled monolayer of thiol-terminated alkane chains on thin gold films deposited on silicon wafers. We also show that it is possible to spatially control the perpendicular orientation of the lamellae at sub-micron length scales by using simple chemical patterns and etch them, in order to produce nanolithographic templates. This method may be of great technological interest for the preparation of well-defined templates using block copolymer thin films.

cond-mat.mtrl-sci