Anatoli Morozov | Searcharxiv

arXiv2026

Multi-Diagnostic Characterization of Laser-Produced Tin Plasmas for EUV Lithography

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, "SparkLight". Tin plasmas are generated by irradiating a continuously moving tin-coated wire with laser pulses (1064 nm, 10 ns, up to $5.7\times10^{10}$ W/cm$^2$) and probed via coherent Thomson scattering, laser interferometry, and EUV emission spectroscopy. Thomson scattering measurements reveal electron temperatures and densities that decay with distance from the target. Densities derived from Thomson scattering are cross-validated against laser interferometry, showing excellent agreement. Correlating the results of these laser diagnostics with spatially resolved EUV spectroscopy suggests that the bulk of useful EUV emission originates within 150 $μ$m of the target and is generated under suboptimal plasma conditions. This work demonstrates a practical integrated approach for plasma characterization in EUV source development.

physics.plasm-ph↗

arXiv2024

Greater than five-order-of-magnitude post-compression temporal contrast improvement with an ionization plasma grating

High-intensity lasers require suppression of prepulses and other non-ideal temporal structure to avoid target disruption before the arrival of the main pulse. To address this, we demonstrate that ionization gratings act as a controllable optical switch for high-power light with a temporal contrast improvement of at least $3\times10^5$ and a switching time less than 500 fs. We also show that a grating system can run for hours at 10 Hz without degradation. The contrast improvement from an ionization grating compares favorably to that achievable with plasma mirrors.

physics.optics↗