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Bavley Guerguis

Publications and source records attributed to Bavley Guerguis.

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APTLAS: An Indexed APT Literature Repository

Atom probe tomography (APT) literature is broad, rapidly growing, and dispersed across a wide range of journals, which can make it difficult to identify prior work on a given material system, instrument, or analytical approach. Conventional search engines (e.g., Google Scholar) excel at general retrieval but do not preserve the domain-specific metadata that often determines the relevance of an APT publication (e.g., analysis mode, laser wavelength, or instrument configuration). Herein, APTLAS is presented, which is an indexed repository of published APT literature. At present, the database contains ~2,300 records, each accompanied by metadata extracted from the source publication. The accompanying web tool, available at https://aptlas.bavleyguerguis.com/, allows users to browse and filter by material system, instrument, application, publication type, or keyword search.

cs.DL

Multi-Length-Scale Dopants Analysis of an Image Sensor via Focused Ion Beam-Secondary Ion Mass Spectrometry and Atom Probe Tomography

The following article presents a multi-length-scale characterization approach for investigating doping chemistry and spatial distributions within semiconductors, as demonstrated using a state-of-the-art CMOS image sensor. With an intricate structural layout and varying doping types/concentration levels, this device is representative of the current challenges faced in measuring dopants within confined volumes using conventional techniques. Focused ion beam-secondary ion mass spectrometry is applied to produce large-area compositional maps with a sub-20 nm resolution, while atom probe tomography is used to extract atomic-scale quantitative dopant profiles. Leveraging the complementary capabilities of the two methods, this workflow is shown to be an effective approach for resolving nano- and micro- scale dopant information, crucial for optimizing the performance and reliability of advanced semiconductor devices.

physics.app-ph