arXiv subjects
Publications and source records attributed to E. Koukharenko.
This paper is concerned with generators that harvest electrical energy from the kinetic energy present in the sensor nodes environment. These generators have the potential to replace or augment battery power which has a limited lifetime and requires periodic replacement which limits the placement and application of the sensor node.
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.