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Georg E. Fantner

Publications and source records attributed to Georg E. Fantner.

6 recordsLinked to original sources

Agentic AI for operating scientific instruments for nanoscale characterization

Operating a scientific instrument such as an atomic force microscope (AFM) requires continuous expert decision-making. A trained user defines the experimental intent, translates it into instrument commands, assesses incoming data, adjusts imaging parameters, and post-processes the final image. Existing automation usually addresses only parts of this workflow through hard-coded routines, task-specific controllers, or trained machine-learning models. Here we present an agentic-AI framework that operates the executable part of the AFM workflow using a general-purpose, tool-augmented large language model connected to instrument functions through the Model Context Protocol (MCP). The framework consists of 3 MCP-based agents: AFM Messenger converts natural-language instructions into checked instrument commands; AFM Pilot assesses image quality through a large language model (LLM) and, if necessary, adapts imaging parameters; and AFM Doctor diagnoses image artifacts and applies transparent post-processing from a pre-approved tool set. Because the language model performs image assessment rather than a fixed scalar objective or external optimizer, the same strategy can be applied across sample types and imaging modes without specific retraining. Safe hardware operation is enforced through an ambiguity check layer before execution. Benchmarking against fine-tuned and off-the-shelf tool-using models shows that this guarded execution layer, rather than model capability alone, reduces wrong-command execution to zero. In live experiments on different samples, AFM Pilot matched expert operators in image quality, iteration count, and tuning time, with no significant difference. These results demonstrate a safe route to agentic operation of scientific instruments, where experimental intent remains human-defined while command execution, image-based tuning, and post-processing are delegated to AI agents.

cs.AI

In-situ correlative SEM/KPFM for semiconductor devices and 2D heterostructures

Correlative nanoscale surface characterization benefits from simultaneously measuring electronic and structural properties in the same environment, a capability that is essential for modern-day materials science and semiconductor failure analysis. In-situ AFM-SEM measurements facilitated by self-sensing cantilevers offer great potential here; however, they are limited due to their inherent capacitive crosstalk. Here, we demonstrate for the first time the in-situ implementation of single-pass heterodyne Kelvin probe force microscopy inside a scanning electron microscope, using piezo-resistive cantilevers. We overcome the capacitive crosstalk prevalent in piezo-resistive cantilevers by demodulating excitation and detection to simultaneously map surface topography and contact potential difference for correlation with compositional analysis. We systematically compare different operational modes of this heterodyne technique, elucidating their spatial resolution, signal sensitivity, and signal-to-noise ratio. The integrated approach yields exceptional signal quality and reveals how electron beam scan parameters can directly influence surface potential contrast. We demonstrate this correlative analysis workflow on two-dimensional heterostructures and semiconductor circuits. This work establishes a robust and versatile correlative imaging mode for in-situ Kelvin force and topography imaging inside a scanning electron microscope for next-generation semiconductor device analysis and materials science.

cond-mat.mes-hall

Separate-scan atomic force microscope for fast infrared scattering-type scanning near-field optical microscope

Pseudo-heterodyne scattering-type scanning near-field optical microscopy (sSNOM) is applied in the mid-infrared region to detect the chemical composition of biomolecules on the nanoscale. However, the application of sSNOM in molecular biology has been limited to static images in air. Recently, bottom illumination sSNOM (BI-sSNOM) was developed for operation in water. Yet, the scan rate of sSNOM remains a bottleneck to record protein structural changes in aqueous solution on the seconds time scale. We designed an optical and mechanical system consisting of a separate scan high-speed atomic force microscope (HS-AFM) coupled to the BI-sSNOM optics. The designed AFM scanner has a mechanical bandwidth of ca 70 kHz along the Z-axis, and ca 6 kHz along the XY-axis, equivalent to the sample scanning HS-AFM. The AFM performance is demonstrated by imaging actin filaments. The optical design is validated by sSNOM experiments on purple membranes and microtubules.

physics.ins-det

A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics

Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive measurements of force, acceleration, or the presence of biological analytes. In particular, strain sensors integrated onto MEMS cantilevers are widely used to transduce an applied force to an electrically measurable signal in applications like atomic force microscopy, mass sensing, or molecular detection. However, the high Young's moduli of traditional cantilever materials (silicon or silicon nitride) limit the thickness of the devices, and therefore the deflection sensitivity that can be obtained for a specific spring constant. Using softer materials such as polymers as the structural material of the MEMS device would overcome this problem. However, these materials are incompatible with high-temperature fabrication processes often required to fabricate high quality electronic strain sensors. We introduce a pioneering solution that seamlessly integrates the benefits of polymer MEMS technology with the remarkable sensitivity of strain sensors, even under high-temperature deposition conditions. Cantilevers made using this technology are inherently fluid compatible and have shown up to 6 times lower force noise than their conventional counterparts. We demonstrate the benefits and versatility of this polymer/ceramic/semiconductor multi-layer fabrication approach with the examples of self-sensing AFM cantilevers, and membrane surface stress sensors for biomolecule detection.

physics.app-ph

Enhanced feedback performance in off-resonance AFM modes through pulse train sampling

Dynamic atomic force microscopy (AFM) modes that operate at frequencies far away from the resonance frequency of the cantilever (off-resonance tapping (ORT) modes) can provide high-resolution imaging of a wide range of sample types, including biological samples, soft polymers, and hard materials. These modes offer precise and stable control of vertical force, as well as reduced lateral force. Simultaneously, they enable mechanical property mapping of the sample. However, ORT modes have an intrinsic drawback: a low scan speed due to the limited ORT rate, generally in the low kHz range. Here, we analyze how the conventional ORT control method limits the topography tracking quality and hence the imaging speed. The closed-loop controller in conventional ORT restricts the sampling rate to the ORT rate and introduces a large closed-loop delay. We present an alternative ORT control method in which the closed-loop controller samples and tracks the vertical force changes during a defined time window of the tip-sample interaction. Through this, we use multiple samples in the proximity of the maximum force for the feedback loop, rather than only one sample at the maximum force instant. This method leads to improved topography tracking at a given ORT rate and therefore enables higher scan rates while refining the mechanical property mapping. Keywords: atomic force microscopy (AFM); off-resonance tapping (ORT); pulsed-force mode; feedback control

physics.ins-det

An atomic force microscope integrated with a helium ion microscope for correlative nanocharacterization

In this work, we report the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of sub-nanometer resolution imaging and machining of nanoscale structures, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented, in situ, correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.

physics.ins-det