arXiv2026
Three-dimensional integrated circuit (3D IC) pack-aging and heterogeneous integration have emerged as central pillars of contemporary semiconductor scaling. Yet, the multi-physics coupling inherent to stacked architectures manifesting as thermal hot spots, warpage-induced stresses, and interconnect aging demands monitoring and control capabilities that surpass traditional offline metrology. Although Digital Twin (DT) technology provides a principled route to real-time reliability management, the existing literature remains fragmented and frequently blurs the distinction between static multiphysics simulation workflows and truly dynamic, closed-loop twins. This critical review distinguishes itself by addressing these deficiencies through three specific contributions. First, we clarify the Digital Twin hierarchy to resolve terminological ambiguity between digital models, shadows, and twins. Second, we synthesize three foundational enabling technologies: (1) physics-based modeling, emphasizing the shift from computationally intensive finite-element analysis (FEA) to real-time surrogate models; (2) data-driven paradigms, highlighting virtual metrology (VM) for inferring latent metrics; and (3) in-situ sensing, the nervous system coupling the physical stack to its virtual counterpart. Third, beyond a descriptive survey, we propose a unified hybrid DT architecture that leverages physics-informed machine learning (e.g., PINNs) to reconcile data scarcity with latency constraints. Finally, we outline a standards-aligned roadmap incorporating IEEE 1451 and UCIe protocols to accelerate the transition from passive digital shadows to autonomous, self-optimizing Digital Twins for 3D IC manufacturing and field operation.