Harshad Mishra | Searcharxiv

arXiv2026

SC-1 Etching of Niobium and Titanium Nitride Thin Films

Dry etching techniques, ubiquitous in microelectronics fabrication, often result in challenging levels of undesired collateral plasma-induced damage. In this work, we demonstrate a wet etching alternative for the patterning of niobium (Nb) and titanium nitride (TiN) thin films using the Standard Cleaning 1 (SC-1) solution. We characterize the etching process through its time-evolution dynamics, supported by scanning-electron and atomic force microscopy assessment of the etched film morphology. The results suggest etch dynamics that are linked to native oxides and film microstructure. Overall, the manageable etch rates, the safe operation and the high material selectivity are attractive for practical use in microelectronics fabrication.

cond-mat.mtrl-sci↗

arXiv2021

Magnomechanics in suspended magnetic beams

Cavity optomechanical systems have become a popular playground for studies of controllable nonlinear interactions between light and motion. Owing to the large speed of light, realizing cavity optomechanics in the microwave frequency range requires cavities up to several mm in size, hence making it hard to embed several of them on the same chip. An alternative scheme with much smaller footprint is provided by magnomechanics, where the electromagnetic cavity is replaced by a magnet undergoing ferromagnetic resonance, and the optomechanical coupling originates from magnetic shape anisotropy. Here, we consider the magnomechanical interaction occurring in a suspended magnetic beam -- a scheme in which both magnetic and mechanical modes physically overlap and can also be driven individually. We show that a sizable interaction can be produced if the beam has some initial static deformation, as is often the case due to unequal strains in the constituent materials. We also show how the magnetism affects the magnetomotive detection of the vibrations, and how the magnomechanics interaction can be used in microwave signal amplification. Finally, we discuss experimental progress towards realizing the scheme.

cond-mat.mes-hall↗