J. J. Chaillout | Searcharxiv

arXiv2011

Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters

This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret Vibration Energy Harvesters (VEH). Electrets charged by a positive corona discharge show excellent stability with high surface charge density that can reach 5mC/m^{2} on 1.1\mum-thick layers, even with fine patterning (down to 25\mum) and harsh temperature conditions (up to 250°C), paving the way to new electret VEH designs and manufacturing processes.

cond-mat.mtrl-sci↗

arXiv2008

A complete study of electroactive polymers for energy scavenging: modelling and experiments

Recent progresses in ultra low power microelectronics propelled the development of several microsensors and particularly the self powered microsystems (SPMS). One of their limitations is their size and their autonomy due to short lifetime of the batteries available on the market. To ensure their ecological energetic autonomy, a promising alternative is to scavenge the ambient energy such as the mechanical one. Nowadays, few microgenerators operate at low frequency. They are often rigid structures that can perturb the application or the environment; none of them are perfectly flexible. Thus, our objective is to create a flexible, non-intrusive scavenger using electroactive polymers. The goal of this work is to design a generator which can provide typically 100 ?W to supply a low consumption system. We report in this paper an analytical model which predicts the energy produced by a simple electroactive membrane, and some promising experimental results.

cs.OH↗