arXiv subjects

J. Schulze

Publications and source records attributed to J. Schulze.

16 recordsLinked to original sources

arXiv2022

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. It is shown that for the considered magnetic field topology the electron current flows through different channels in the (r, z) plane: a ``transverse'' one, which involves current flow through the electrons' magnetic confinement region (EMCR) above the racetrack, and two ''longitudinal'' ones. Electrons gain energy from the electric field along these channels following various mechanisms, which are rather distinct from those sustaining dc-powered magnetrons. The longitudinal power absorption involves mirror-effect heating (MEH), nonlinear electron resonance heating (NERH), magnetized bounce heating (MBH), and the heating by the ambipolar field at the sheath-presheath interface. The MEH and MBH represent two new mechanisms missing from the previous literature. The MEH is caused by a reversed electric field needed to overcome the mirror force generated in a nonuniform magnetic field to ensure sufficient flux of electrons to the powered electrode, and the MBH is related to a possibility for an electron to undergo multiple reflections from the expanding sheath in the longitudinal channels connected by the arc-like magnetic field. The electron heating in the transverse channel is caused mostly by the essentially collisionless Hall heating in the EMCR above the racetrack, generating a strong ExB azimuthal drift velocity. The latter mechanism results in an efficient electron energization, i.e., energy transfer from the electric field to electrons in the inelastic range. Since the main electron population energized by this mechanism remains confined within the discharge for a long time, its contribution to the ionization processes is dominant.

physics.plasm-ph↗

arXiv2022

Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results

Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm at a driving frequency of 10~MHz and a peak-to-peak voltage of 350 V. The pressure of the gas mixture is varied between 15 Pa and 500 Pa, while the neon/oxygen concentration is tuned between 10% and 90%. For all discharge conditions, the spatio-temporal distribution of the electron-impact excitation rate from the Ne ground state into the Ne $\rm{2p^53p_0}$ state measured by PROES and obtained from PIC/MCC simulations show good qualitative agreement. Based on the emission/excitation patterns, multiple operation regimes are identified. Localized bright emission features at the bulk boundaries, caused by local maxima in the electronegativity are found at high pressures and high O$_2$ concentrations. The relative contributions of the ambipolar and the Ohmic electron power absorption are found to vary strongly with the discharge parameters: the Ohmic power absorption is enhanced by both the high collisionality at high pressures and the high electronegativity at low pressures. In the wide parameter regime covered in this study, the PROES measurements are found to accurately represent the ionization dynamics, i.e., the discharge operation mode. This work represents also a successful experimental validation of the discharge model developed for neon-oxygen CCPs.

physics.plasm-ph↗

arXiv2021

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode surface characteristics. For this latter, we consider and vary the coefficients that characterize the elastic reflection of the electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on Particle-in-Cell/Monte Carlo Collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to affect slightly the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.

physics.plasm-ph↗

arXiv2021

Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations

The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80\% N$_2$ and 20\% O$_2$, at atmospheric pressure, 100$\,$kPa, under both DC conditions and a pulsed DC waveform that represent AC conditions. The simulated geometry is a simplification of the symmetric and fully exposed SDBD resulting in the simultaneous ignition of both positive and negative streamers on either side of the Al$_2$O$_3$ dielectric barrier. In order to determine the interactivity of the two streamers, the propagation behavior for the positive and negative streamers are investigated both independently and simultaneously under identical constant voltage conditions. An additional focus is implored under a fast sub nanosecond rise time square voltage pulse alternating between positive and negative voltage conditions, thus providing insight into the dynamics of the streamers under alternating polarity switches. It is shown that the simultaneous ignition of both streamers, as well as using the pulsed DC conditions, provides both an enhanced discharge and an increased surface coverage. It is also shown that additional streamer branching may occur in a cross section that is difficult to experimentally observe. The enhanced discharge and surface coverage may be beneficial to many applications such as, but are not limited to: air purification, volatile organic compound removal, and plasma enhanced catalysis.

physics.plasm-ph↗

arXiv2018

Transient Phenomena in Sub-Band Gap Impact Ionization in Si NIPIN Diode

Sub-band-gap (SBG) impact ionization (II) enables steep subthreshold slope that enables devices to overcome the thermal limit of 60mV/decade. This phenomenon at low voltage enables various applications in logic, memory and neuromorphic engineering. Recently, we have demonstrated sub-0.2V II in NIPIN diode experimentally primarily based on the steady-state analysis. In this paper, we present the detailed experimental transient behavior of SBG-II in NIPIN. The SBG-II generated holes are stored in the p-well. First, we extract the leakage mechanism from the p-well to show two mechanisms (i) recombination-generation (RG) and (ii) over the barrier (OTB) where OTB dominates when barrier height $ phy_b<0.59eV $. Second, we analytically extract the SBG II current (Iii) at 300K from experimental results. The drain current (Id), the electric field (E-field), and Iii are plotted in time. We observe that Iii increase as E-field reduces which indicates that E-field does not primarily contribute to Iii. Further, the Id shows two distinct behaviors (i) Iii (Id) is constant at the beginning and (ii) eventually universal Iii (Id) is linear, i.e. Iii=k X Id where $ k=10^-3$; We also show that the electrons primarily contributing to Id are directly incapable of II due to insufficient energy $(<Eg)$. Fischetti's model showed that SBG-II is primarily caused by hot electrons that accept energy in an Auger-like process from cold drain electrons to enable SBG-II. We speculate that if the Id electrons heat-up the cold drain electrons, which would further energize the hot electrons to produce the observed Iii (Id) universal dependence.

physics.app-ph↗

arXiv2016

A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas

A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients ($γ$-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of Phase Resolved Optical Emission Spectroscopy and particle-based kinetic simulations. In such plasmas (under most conditions in electropositive gases) the spatio-temporally resolved electron-impact excitation/ionization rate features two distinct maxima adjacent to each electrode at different times within each RF period. While one maximum is the consequence of the energy gain of electrons due to sheath expansion, the second maximum is produced by secondary electrons accelerated towards the plasma bulk by the sheath electric field at the time of maximum voltage drop across the adjacent sheath. Due to these different excitation/ionization mechanisms, the ratio of the intensities of these maxima is very sensitive to the secondary electron emission coefficient $γ$. This sensitvity, in turn, allows $γ$ to be determined by comparing experimental excitation profiles and simulation data obtained with various $γ$-coefficients. The diagnostic, tested here in a geometrically symmetric argon discharge, yields an effective secondary electron emission coefficient of $γ= 0.066 \pm 0.01$ for stainless steel electrodes.

physics.plasm-ph↗

arXiv2016

Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a theoretical model based on an equivalent circuit, we investigate the self-excitation of PSR oscillations and their effect on the electron heating in geometrically symmetric CCRF plasmas driven by multiple consecutive harmonics. The discharge symmetry is controlled via the Electrical Asymmetry Effect, i.e. by varying the total number of harmonics and tuning the phase shifts between them. It is demonstrated that PSR oscillations will be self-excited under both symmetric and asymmetric conditions, if (i) the charge-voltage relation of the plasma sheaths deviates from a simple quadratic behavior and if (ii) the inductance of the plasma bulk exhibits a temporal modulation. These two effects have been neglected up to now, but we show that they must be included in the model in order to properly describe the nonlinear series resonance circuit and reproduce the self-excitation of PSR oscillations, which are observed in the electron current density resulting from simulations of geometrically symmetric CCRF plasmas. Furthermore, the effect of the PSR self-excitation on the discharge current and the plasma properties, such as the potential profile, is illustrated by applying Fourier analysis. High frequency oscillations in the entire spectrum between the applied frequencies and the local electron plasma frequency are observed. As a consequence, the electron heating is strongly enhanced by the presence of PSR oscillations.

physics.plasm-ph↗

arXiv2016

Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform, i.e. adjusting the phases and amplitudes of the applied harmonics, to optimize the accumulation of ions created by charge exchange collisions and their subsequent acceleration by the sheath electric field. The position of the peak (i.e. the ion energy) and the flux of the ions within the peak of the IDF can be controlled in a wide domain by tuning the parameters of the applied RF voltage waveform, allowing optimization of various applications where surface reactions are induced at particular ion energies.

physics.plasm-ph↗

arXiv2016

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an analytical model. The model allows to calculate the electric field outside the electrode sheaths, space and time resolved within the RF period. Electrons are found to be heated by strong ambipolar electric fields outside the sheath during the phase of sheath expansion in addition to classical sheath expansion heating. By tracing individual electrons we also show that ionization is primarily caused by electrons that collide with the expanding sheath edge multiple times during one phase of sheath expansion due to backscattering towards the sheath by collisions. A synergistic combination of these different heating events during one phase of sheath expansion is required to accelerate an electron to energies above the threshold for ionization. The ambipolar electric field outside the sheath is found to be time modulated due to a time modulation of the electron mean energy caused by the presence of sheath expansion heating only during one half of the RF period at a given electrode. This time modulation results in more electron heating than cooling inside the region of high electric field outside the sheath on time average. If an electric field reversal is present during sheath collapse, this time modulation and, thus, the asymmetry between the phases of sheath expansion and collapse will be enhanced. We propose that the ambipolar electron heating should be included in models describing electron heating in capacitive RF plasmas.

physics.plasm-ph↗

arXiv2015

Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas

The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot and cold electrons, as well as the conduction and displacement currents reveals the mechanism of the formation of multiple electron beams during sheath expansion. The interplay between highly energetic beam electrons and low energetic bulk electrons is identified as the physical origin of the excitation of harmonics in the current.

physics.plasm-ph↗

arXiv2015

Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs) several simplifications are made: (i) fast neutrals are not traced, (ii) heavy particle induced excitation and ionization are neglected, (iii) secondary electron emission from boundary surfaces due to neutral particle impact is not taken into account, and (iv) the secondary electron emission coefficient is assumed to be constant, i.e. independent of the incident particle energy and the surface conditions. Here we question the validity of these simplifications under conditions typical for plasma processing applications. We study the effects of including fast neutrals and using realistic energy-dependent secondary electron emission coefficients for ions and fast neutrals in simulations of CCPs operated in argon at 13.56 MHz and at neutral gas pressures between 3 Pa and 100 Pa. We find a strong increase of the plasma density and the ion flux to the electrodes under most conditions, if these processes are included realistically in the simulation. The sheath widths are found to be significantly smaller and the simulation is found to diverge at high pressures for high voltage amplitudes in qualitative agreement with experimental findings. By switching individual processes on and off in the simulation we identify their individual effects on the ionization dynamics and plasma parameters. We conclude that fast neutrals and energy-dependent secondary electron emission coefficients must be included in simulations of CCPs in order to yield realistic results.

physics.plasm-ph↗

arXiv2015

The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this non-local collisionless regime. Instead, a step-like increase at a distinct driving frequency is observed. Based on the analytical power balance model, in combination with a detailed analysis of the electron kinetics, the density jump is found to be caused by an electron heating mode transition from the classical $α$-mode into a low density resonant heating mode characterized by the generation of two energetic electron beams at each electrode per sheath expansion phase. These electron beams propagate through the bulk without collisions and interact with the opposing sheath. In the low density mode, the second beam is found to hit the opposing sheath during its collapse. Consequently, a high number of energetic electrons is lost at the electrodes resulting in a poor confinement of beam electrons in contrast to the classical $α$-mode observed at higher driving frequencies. Based on the analytical model this modulated confinement quality and the related modulation of the energy lost per electron lost at the electrodes is demonstrated to cause the step-like change of the plasma density. The effects of a variation of the electrode gap, the neutral gas pressure, the electron sticking and secondary electron emission coefficients of the electrodes on this step-like increase of the plasma density are analyzed based on the simulation results.

physics.plasm-ph↗

arXiv2013

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of electrons and ionization in the plasma bulk due to high bulk electric fields are observed at distinct times within the RF period. Based on the model the electric field is identified to be a drift field caused by a low electrical conductivity due to the high electron-neutral collision frequency at atmospheric pressure. Thus, the ionization is mainly caused by ohmic heating in this "Omega-mode". The phase of strongest bulk electric field and ionization is affected by the driving voltage amplitude. At high amplitudes, the plasma density is high, so that the sheath impedance is comparable to the bulk resistance. Thus, voltage and current are about 45° out of phase and maximum ionization is observed during sheath expansion with local maxima at the sheath edges. At low driving voltages, the plasma density is low and the discharge becomes more resistive resulting in a smaller phase shift of about 4°. Thus, maximum ionization occurs later within the RF period with a maximum in the discharge center. Significant analogies to electronegative low pressure macroscopic discharges operated in the Drift-Ambipolar mode are found, where similar mechanisms induced by a high electronegativity instead of a high collision frequency have been identified.

physics.plasm-ph↗

arXiv2013

Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime

The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the entire discharge, a planar radio frequency capacitively coupled plasma (RF-CCP) with an additional heating source. The second code is based on the recently published scheme Ensemble-in-Spacetime (EST); it resolves only the sheath and requires the time resolved voltage across and the ion flux into the sheath as input. Ion inertia causes a temporal asymmetry (hysteresis) of the sheath charge-voltage relation; also other ion transit time effects are found. The two codes are in good agreement, both with respect to the spatial and temporal dynamics of the sheath and with respect to the ion energy distributions at the electrodes. It is concluded that the EST scheme may serve as an efficient post-processor for fluid or global simulations and for measurements: It can rapidly and accurately calculate ion distribution functions even when no genuine kinetic information is available.

physics.plasm-ph↗

arXiv2012

Technical Design Report for the: PANDA Micro Vertex Detector

This document illustrates the technical layout and the expected performance of the Micro Vertex Detector (MVD) of the PANDA experiment. The MVD will detect charged particles as close as possible to the interaction zone. Design criteria and the optimisation process as well as the technical solutions chosen are discussed and the results of this process are subjected to extensive Monte Carlo physics studies. The route towards realisation of the detector is outlined.

physics.ins-det↗

arXiv2012

Technical Design Report for the: PANDA Straw Tube Tracker

This document describes the technical layout and the expected performance of the Straw Tube Tracker (STT), the main tracking detector of the PANDA target spectrometer. The STT encloses a Micro-Vertex-Detector (MVD) for the inner tracking and is followed in beam direction by a set of GEM-stations. The tasks of the STT are the measurement of the particle momentum from the reconstructed trajectory and the measurement of the specific energy-loss for a particle identification. Dedicated simulations with full analysis studies of certain proton-antiproton reactions, identified as being benchmark tests for the whole PANDA scientific program, have been performed to test the STT layout and performance. The results are presented, and the time lines to construct the STT are described.

physics.ins-det↗