arXiv subjects

Jorden Senior

Publications and source records attributed to Jorden Senior.

8 recordsLinked to original sources

arXiv2026

SC-1 Etching of Niobium and Titanium Nitride Thin Films

Dry etching techniques, ubiquitous in microelectronics fabrication, often result in challenging levels of undesired collateral plasma-induced damage. In this work, we demonstrate a wet etching alternative for the patterning of niobium (Nb) and titanium nitride (TiN) thin films using the Standard Cleaning 1 (SC-1) solution. We characterize the etching process through its time-evolution dynamics, supported by scanning-electron and atomic force microscopy assessment of the etched film morphology. The results suggest etch dynamics that are linked to native oxides and film microstructure. Overall, the manageable etch rates, the safe operation and the high material selectivity are attractive for practical use in microelectronics fabrication.

cond-mat.mtrl-sci↗

arXiv2026

Multiplexed microwave resonators by frequency comb spectroscopy

Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency comb spectrum using a superconducting quantum interference device (SQUID) driven by a time-dependent magnetic field. Here, the frequency comb is used to spectroscopically probe a bank of coplanar microwave resonators, inductively coupled to a common transmission line, a standard circuit with a variety of applications. We compare the resonator line shape obtained from signals synthesized at room temperature using conventional electronics with the radiation produced in the cryogenic environment by our source, showing substantial equivalence in the estimation of the resonator quality factors. To measure non-uniformly spaced resonant frequencies, we drive the generator with a bi-chromatic tone to generate intermodulation products. Such a dense frequency comb spectrum enables simultaneous addressing of a few resonators via frequency multiplexing. Finally, we discuss the criteria for achieving effective spectroscopic coverage of a given frequency bandwidth.

quant-ph↗

arXiv2025

Native-oxide-passivated trilayer junctions for superconducting qubits

Superconducting qubits in today's quantum processing units are typically fabricated with angle-evaporated aluminum--aluminum-oxide--aluminum Josephson junctions. However, there is an urgent need to overcome the limited reproducibility of this approach when scaling up the number of qubits and junctions. Fabrication methods based on subtractive patterning of superconductor--insulator--superconductor trilayers, used for more classical large-scale Josephson junction circuits, could provide the solution but they in turn often suffer from lossy dielectrics incompatible with high qubit coherence. In this work, we utilize native aluminum oxide as a sidewall passivation layer for junctions based on aluminum--aluminum-oxide--niobium trilayers, and use such junctions in qubits. We design the fabrication process such that the few-nanometer-thin native oxide is not exposed to oxide removal steps that could increase its defect density or hinder its ability to prevent shorting between the leads of the junction. With these junctions, we design and fabricate transmon-like qubits and measure time-averaged coherence times up to 30 $μ$s at a qubit frequency of 5 GHz, corresponding to a qubit quality factor of one million. Our process uses subtractive patterning and optical lithography on wafer scale, enabling high throughput in patterning. This approach provides a scalable path toward fabrication of superconducting qubits on industry-standard platforms.

quant-ph↗

arXiv2024

Effect of ion irradiation on superconducting thin films

We demonstrate ion irradiation by argon or gallium as a wafer-scale post-processing method to increase disorder in superconducting thin films. We study several widely used superconductors, both single-elements and compounds. We show that ion irradiation increases normal-state resistivity in all our films, which is expected to enable tuning their superconducting properties, for example, toward higher kinetic inductance. We observe an increase of superconducting transition temperature for Al and MoSi, and a decrease for Nb, NbN, and TiN. In MoSi, ion irradiation also improves the mixing of the two materials. We demonstrate fabrication of an amorphous and homogeneous film of MoSi with uniform thickness, which is promising, e.g., for superconducting nanowire single-photon detectors.

cond-mat.supr-con↗

arXiv2024

Wafer-scale CMOS-compatible graphene Josephson field-effect transistors

Electrostatically tunable Josephson field-effect transistors (JoFETs) are one of the most desired building blocks of quantum electronics. JoFET applications range from parametric amplifiers and superconducting qubits to a variety of integrated superconducting circuits. Here, we report on graphene JoFET devices fabricated with wafer-scale complementary metal-oxide-semiconductor (CMOS) compatible processing based on wet transfer of chemical vapour deposited graphene, atomic-layer-deposited Al$_{2}$O$_{3}$ gate oxide, and evaporated superconducting Ti/Al source, drain, and gate contacts. By optimizing the contact resistance down to $\sim$ 170 $Ωμm$, we observe proximity-induced superconductivity in the JoFET channels with different gate lengths of 150 - 350 nm. The Josephson junction devices show reproducible critical current $I_{\text{C}}$ tunablity with the local top gate. Our JoFETs are in short diffusive limit with the $I_{\text{C}}$ reaching up to $\sim\,$3 $μA$ for a 50 $μm$ channel width. Overall, our demonstration of CMOS-compatible 2D-material-based JoFET fabrication process is an important step toward graphene-based integrated quantum circuits.

physics.app-ph↗

arXiv2019

Heat rectification via a superconducting artificial atom

In miniaturising electrical devices down to nanoscales, heat transfer has turned into a serious obstacle but also potential resource for future developments, both for conventional and quantum computing architectures. Controlling heat transport in superconducting circuits has thus received increasing attention in engineering microwave environments for circuit quantum electrodynamics (cQED) and circuit quantum thermodynamics experiments (cQTD). While theoretical proposals for cQTD devices are numerous, the experimental situation is much less advanced. There exist only relatively few experimental realisations, mostly due to the difficulties in developing the hybrid devices and in interfacing these often technologically contrasting components. Here we show a realisation of a quantum heat rectifier, a thermal equivalent to the electronic diode, utilising a superconducting transmon qubit coupled to two strongly unequal resonators terminated by mesoscopic heat baths. Our work is the experimental realisation of the spin-boson rectifier proposed by Segal and Nitzan.

cond-mat.mes-hall↗

arXiv2019

Utilization of the Superconducting Transition for Characterizing Low-Quality-Factor Superconducting Resonators

Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g. for thermal engineering and detection. We present experiments on $λ/4$ superconducting niobium coplanar waveguide (CPW) resonators, terminating at the antinode by a dissipative copper microstrip via aluminum leads, such that the resonator response is difficult to measure in a typical microwave environment. By measuring the transmission both above and below the superconducting transition of aluminum, we are able to isolate the resonance. We then experimentally verify this method with copper microstrips of increasing thicknesses, from 50 nm to 150 nm, and measure quality factors in the range of $10\sim67$ in a consistent way.

cond-mat.supr-con↗

arXiv2018

Tunable photonic heat transport in a quantum heat valve

Quantum thermodynamics is emerging both as a topic of fundamental research and as means to understand and potentially improve the performance of quantum devices. A prominent platform for achieving the necessary manipulation of quantum states is superconducting circuit quantum electrodynamics (QED). In this platform, thermalization of a quantum system can be achieved by interfacing the circuit QED subsystem with a thermal reservoir of appropriate Hilbert dimensionality. Here we study heat transport through an assembly consisting of a superconducting qubit capacitively coupled between two nominally identical coplanar waveguide resonators, each equipped with a heat reservoir in the form of a normal-metal mesoscopic resistor termination. We report the observation of tunable photonic heat transport through the resonator-qubit-resonator assembly, showing that the reservoir-to-reservoir heat flux depends on the interplay between the qubit-resonator and the resonator-reservoir couplings, yielding qualitatively dissimilar results in different coupling regimes. Our quantum heat valve is relevant for the realisation of quantum heat engines and refrigerators, that can be obtained, for example, by exploiting the time-domain dynamics and coherence of driven superconducting qubits. This effort would ultimately bridge the gap between the fields of quantum information and thermodynamics of mesoscopic systems.

cond-mat.mes-hall↗