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Juho Luomahaara

Publications and source records attributed to Juho Luomahaara.

5 recordsLinked to original sources

Cryogenic wafer probing below one Kelvin: Characterization of normal-metal Coulomb blockade thermometers at wafer scale

Coulomb blockade thermometers (CBTs) have attracted more interest in recent years, as the demand for sub-one Kelvin thermometry has increased, especially due to the prevalence of dilution refrigerators in research and applications in quantum technology. CBTs can be operated both as a primary thermometer, requiring no prior calibration, or as a simple resistance thermometer in the secondary mode after calibration. As new scalable fabrication processes for quantum devices and cryogenic electronics are being developed, cryogenic wafer characterization methods must also scale up to provide statistical data on device parameters. Currently, characterization throughput of cryogenic devices is limited by the turnover time and sample capacity of traditional cryostats, where a measurement cycle for only a few devices can take several days. In this work, we demonstrate wafer-scale cryogenic characterization of a recently developed TiW/Al-AlOx/TiW normal-metal tunnel junction technology using CBTs. Measurements performed in a 300 mm cryogenic wafer prober (CWP) show on-chip electron temperatures below 700 mK across a full 150 mm wafer, as determined by primary thermometry. These results establish wafer-level testing below 1 K as a viable approach for large-scale cryogenic characterization of electrical devices, opening a pathway toward high-throughput screening of quantum devices and direct wafer-scale characterization of aluminum-based superconducting circuits.

cond-mat.mes-hall

A scalable non-superconducting tunnel junction technology

Tunnel junctions are one of the key elements of chip-scale microsystems serving various technologies from classical microelectronics to quantum information. Aluminium and its oxide (AlOx) have dominated cryogenic tunnel junction technology for decades due to the high quality of AlOx barriers and Al superconducting properties below 1.2 K. However, many applications require non-superconducting junctions, either standalone or in combination with superconducting technology, motivating efforts to suppress Al superconductivity through magnetic fields, doping, or proximity effects -- approaches that so far suffered from integration compatibility and scalability issues. Here, we present a CMOS-compatible normal-metal tunnel junction technology based on TiW alloy and AlOx barriers. We demonstrate wafer-scale fabrication of TiW/Al-AlOx/TiW junctions and validate their performance in Coulomb blockade thermometers operating down to 20 mK, confirming robust normal-state behavior. This TiW-based architecture offers a scalable solution for non-superconducting tunnel junctions across a broad temperature range, enabling integration into advanced cryogenic, quantum and nanoelectronic chip-level systems.

cond-mat.mes-hall

Multiplexed readout of kinetic inductance bolometer arrays

Kinetic inductance bolometer (KIB) technology is a candidate for passive sub-millimeter wave and terahertz imaging systems. Its benefits include scalability into large 2D arrays and operation with intermediate cryogenics in the temperature range of 5 -- 10 K. We have previously demonstrated the scalability in terms of device fabrication, optics integration, and cryogenics. In this article, we address the last missing ingredient, the readout. The concept, serial addressed frequency excitation (SAFE), is an alternative to full frequency-division multiplexing at microwave frequencies conventionally used to read out kinetic inductance detectors. We introduce the concept, and analyze the criteria of the multiplexed readout avoiding the degradation of the signal-to-noise ratio in the presence of a thermal anti-alias filter inherent to thermal detectors. We present a practical scalable realization of a readout system integrated into a prototype imager with 8712 detectors. This is used for demonstrating the noise properties of the readout. Furthermore, we present practical detection experiments with a stand-off laboratory-scale imager.

physics.app-ph

Side-wall spacer passivated sub-um Josephson junction fabrication process

We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for smooth crossline contacting and low parasitic capacitance. The SWAPS structure enables formation of junctions with dimensions at or below the lithography-limited linewidth. An additional benefit is avoiding the excessive use of amorphous dielectric materials which is favorable in sub-Kelvin microwave applications often plagued by nonlinear and lossy dielectrics. We apply the structure to niobium trilayer junctions, and provide characterization results yielding evidence on wafer-scale scalability, and critical current density tuning in the range of 0.1 -- 3.0 kA/cm$^2$. We discuss the applicability of the junction process in the context of different applications, such as, SQUID magnetometers and Josephson parametric amplifiers.

cond-mat.supr-con

Kinetic Inductance Magnetometer

Ultrasensitive magnetic field detection is utilized in the fields of science, medicine and industry. We report on a novel magnetometer relying on the kinetic inductance of superconducting material. The kinetic inductance exhibits a non-linear response with respect to DC current, a fact that is exploited by applying magnetic flux through a superconducting loop to generate a shielding current and a change in the inductance of the loop. The magnetometer is arranged into a resonator, allowing readout through a transmission measurement that makes the device compatible with radio frequency multiplexing techniques. The device is fabricated using a single thin-film layer of NbN, simplifying the fabrication process compared to existing magnetometer technologies considerably. Our experimental data, supported by theory, demonstrates a magnetometer having potential to replace established technology in applications requiring ultra-high sensitivity.

physics.ins-det