arXiv subjects

Julian Schulze

Publications and source records attributed to Julian Schulze.

30 records · Page 2Linked to original sources

arXiv2020

Plasma propagation dynamics in a patterned dielectric barrier discharge at different length scales

Packed bed plasma reactors (PBPRs) inherently have complex geometries where the volume between the electrodes is filled with dielectric/catalytic pellets to form an array of voids and cavities. This design generates multiple length scales i.e. the dimension of the plasma region (of the order of centimeters), of the dielectric/catalytic pellets (of the order of millimeters) and of the void between the dielectrics (or cavities) and/or surface pores that can reach micrometer dimensions. The plasma is formed as an array of connected or segmented microdischarges. The understanding of plasma propagation on these diverse length scales is important in optimizing and controlling this process. In this work, we investigate the discharge formation and propagation at different length scales as a function of applied voltage in a simplified design of PBPRs, a patterned dielectric barrier discharge (p-DBD), operated in helium at atmospheric pressure, using phase and space resolved optical emission spectroscopy (PROES). The p-DBD is based on an array of plasma facing glass hemispheres implemented into one of two electrodes and regularly arranged in a hexagonal pattern. The plasma is initiated as filamentary microdischarges at the positions of minimum gap followed by radial acceleration of electrons over the dielectric surface as surface ionization waves to finally form surface microdischarges at the voids between the pellets, i.e. at the contact points. With the increase of the voltage amplitude, subsequent pulses of surface microdischarges are generated at the contact points. The plasma emission of each of the surface micro-discharges (S-MD) is found to consist of microscopic structures whose emission intensity increases as a function of the driving voltage amplitude. Adjacent microdischarges interact to generate a wave-like emission intensity propagation from the center of the array to the edges.

physics.plasm-ph↗

arXiv2020

Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources

We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of the bouncing electrons under the influence of the spatio-temporally varying electric field. A method is developed to explain the generation of the various features as a function of surface processes and to identify the trajectories of electrons of different origin.

physics.plasm-ph↗

arXiv2019

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

A thorough understanding of the energy transfer mechanism from the electric field to electrons is of utmost importance for optimization and control of different plasma sources and processes. This mechanism, called electron power absorption, involves complex electron dynamics in electronegative capacitively coupled plasmas (CCPs) at low pressures, that are still not fully understood. Therefore, we present a spatio-temporally resolved analysis of electron power absorption in low pressure oxygen CCPs based on the momentum balance equation derived from the Boltzmann equation. Data are obtained from 1d3v Particle-In-Cell / Monte Carlo Collision simulations. In contrast to conventional theoretical models, which predict 'stochastic/collisionless heating' to be important at low pressure, we observe the dominance of Ohmic power absorption. In addition, there is an attenuation of ambipolar power absorption at low pressures due to the strong electronegativity, and the presence of electropositive edge regions in the discharge, which cause a high degree of temporal symmetry of the electron temperature within the RF period.

physics.plasm-ph↗

arXiv2018

Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms

We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as well as the possibilities of the independent control of the ion flux and the ion energy are analysed for different types of excitation: single- and classical dual-frequency, as well as valleys- and sawtooth-type waveforms. The studies are based on kinetic, particle-based simulations that reveal the physics of these discharges in great details. The conditions cover weakly collisional to highly collisional domains of ion transport via the electrode sheaths. Analytical models are also applied to understand the features of the energy and angular distribution functions.

physics.plasm-ph↗

arXiv2018

Multi frequency matching for voltage waveform tailoring

Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribution functions, homogeneity of the ionflux or ionization dynamics. So far this technology, while being extensively studied in academia, has yet to be established in applications. One reason for this is the lack of a suitable multi-frequency matching network that allows for maximum power absorption for each excitation frequency that is generated and transmitted via a single broadband amplifier. In this work, a method is introduced for designing such a network based on network theory and synthesis. Using this method, a circuit simulation is established that connects an exemplary matching network to an equivalent circuit plasma model of a capacitive radio-frequency discharge. It is found that for a range of gas pressures and number of excitation frequencies the matching conditions can be satisfied, which proves the functionality and feasibility of the proposed concept. Based on the proposed multi-frequency impedance matching, tailored voltage waveforms can be used at an industrial level.

physics.plasm-ph↗

arXiv2017

Striations in electronegative capacitively coupled radio-frequency plasmas: effects of the pressure, voltage, and electrode gap

Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely composed of CF_3^+ and F^- ions) resonates with the excitation frequency. In this work we explore the effects of the gas pressure, the RF voltage, and the electrode gap on this striated structure by Phase Resolved Optical Emission Spectroscopy and Particle-In-Cell/Monte Carlo Collisions simulations. The measured electronic excitation patterns at different external parameters show a good general agreement with the spatio-temporal plots of the ionization rate obtained from the simulations. For a fixed driving frequency the minima of the CF_3^+ and F^- ion densities (between the density peaks in the bulk) are comparable and independent of other external parameters. However, the ion density maxima generally increase as a function of the pressure or RF voltage, leading to the enhanced spatial modulation of plasma parameters. The striation gap (defined as the distance between two ion density peaks) is approximately inversely proportional to the pressure, while it exhibits a weak dependence on the RF voltage and the electrode gap. A transition between the striated and non-striated modes can be observed by changing either the pressure or the RF voltage; for 13.56 MHz and 18 MHz driving frequencies we present a phase diagram as a function of the pressure and voltage amplitude parameters.

physics.plasm-ph↗

arXiv2017

QDB: a new database of plasma chemistries and reactions

One of the most challenging and recurring problems when modelling plasmas is the lack of data on key atomic and molecular reactions that drive plasma processes. Even when there are data for some reactions, complete and validated datasets of chemistries are rarely available. This hinders research on plasma processes and curbs development of industrial applications. The QDB project aims to address this problem by providing a platform for provision, exchange, and validation of chemistry datasets. A new data model developed for QDB is presented. QDB collates published data on both electron scattering and heavy-particle reactions. These data are formed into reaction sets, which are then validated against experimental data where possible. This process produces both complete chemistry sets and identifies key reactions that are currently unreported in the literature. Gaps in the datasets can be filled using established theoretical methods. Initial validated chemistry sets for SF$_6$/CF$_4$/O$_2$ and SF$_6$/CF$_4$/N$_2$/H$_2$ are presented as examples.

physics.plasm-ph↗

arXiv2017

Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by Phase Resolved Optical Emission Spectroscopy (PROES) and their formation was analyzed and understood by Particle in Cell / Monte Carlo Collision (PIC/MCC) simulations [Y.-X. Liu, et al. Phys. Rev. Lett. 116, 255002 (2016)]. The striations were found to result from the periodic generation of double layers due to the modulation of the densities of positive and negative ions responding to the externally applied RF potential. In this work, an in-depth analysis of the formation of striations is given, as well as the effect of the driving frequency on the plasma parameters, such as the spatially modulated charged species densities, the electric field, and the electron power absorption is studied by PROES measurements, PIC/MCC simulations, and an ion-ion plasma model. The measured spatio-temporal electronic excitation patterns at different driving frequencies show a high degree of consistency with the simulation results. The striation gap (i.e., the distance between two ion density maxima) is found to be inversely proportional to the driving frequency. In the presence of striations the minimum(CF_3^+, F^-) ion densities in the bulk region exhibit an approximately quadratic increase with the driving frequency. For these densities, the eigenfrequency of the ion-ion plasma is near the driving frequency, indicating that a resonance occurs between the positive and negative ions and the oscillating electric field inside the plasma bulk. The maximum ion densities in the plasma bulk are found not to exhibit a simple dependence on the driving frequency, since these ion densities are abnormally enhanced within a certain frequency range due to the ions being focused into the "striations" by the spatially modulated electric field inside the bulk region.

physics.plasm-ph↗

arXiv2016

Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas

Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

physics.plasm-ph↗

arXiv2016

On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges

The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, which is necessary for the self-excitation of resonance oscillations with frequencies above the applied frequencies, is caused predominantly by the quadratic contribution to the charge-voltage relation of the plasma sheaths. Using PIC/MCC simulations of single- and multi- frequency capacitive discharges and an equivalent circuit model, we demonstrate that other mechanisms such as a cubic contribution to the charge-voltage relation of the plasma sheaths and the time dependent bulk electron plasma frequency can cause the self-excitation of PSR oscillations, as well. These mechanisms have been neglected in previous models, but are important for the theoretical description of the current in symmetric or weakly asymmetric discharges.

physics.plasm-ph↗

arXiv2013

Transport control of dust particles via the Electrical Asymmetry Effect: experiment, simulation, and modeling

The control of the spatial distribution of micrometer-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically, dust particles in plasmas form a layer located at the sheath edge adjacent to the bottom electrode. Here, a method of manipulating this distribution by the application of a specific excitation waveform, i.e. two consecutive harmonics, is discussed. Tuning the phase angle θbetween the two harmonics allows to adjust the discharge symmetry via the Electrical Asymmetry Effect (EAE). An adiabatic (continuous) phase shift leaves the dust particles at an equilibrium position close to the lower sheath edge. Their levitation can be correlated with the electric field profile. By applying an abrupt phase shift the dust particles are transported between both sheaths through the plasma bulk and partially reside at an equilibium position close to the upper sheath edge. Hence, the potential profile in the bulk region is probed by the dust particles providing indirect information on plasma properties. The respective motion is understood by an analytical model, showing both the limitations and possible ways of optimizing this sheath-to-sheath transport. A classification of the transport depending on the change in the dc self bias is provided, and the pressure dependence is discussed.

physics.plasm-ph↗

arXiv2013

The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P. Chabert and J.P. Booth, J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e. a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find, that the superposition of the EAE and the SEAE is non-linear, i.e. the asymmetries generated by each individual effect do not simply add up. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.

physics.plasm-ph↗