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Máté Vass

Publications and source records attributed to Máté Vass.

3 recordsLinked to original sources

A Nonlinear Two-Sheath Circuit Model for Low-Pressure Symmetric and Asymmetric Capacitively Coupled Radio-Frequency Plasmas

We develop a nonlinear self-consistent two-sheath circuit model for low-pressure capacitively coupled plasmas that applies to geometrically symmetric as well as asymmetric discharges. The quasineutral plasma bulk is represented by an inductive-resistive element and coupled to stationary particle and electron-energy balances. Both boundary sheaths are treated dynamically using a lncosh sheath charge-voltage model with bounded differential elastance, based on a Riccati closure for the differential sheath width. The model recovers the quadratic depletion-sheath relation in the small-charge limit, while the characteristic sheath scales are determined from the RF-averaged sheath voltages using a collisionless Child-Langmuir/Bohm closure. The resulting four-variable RF subsystem contains the two sheath charges, the blocking-capacitor voltage, and the discharge current. In the symmetric monofrequent limit, the two sheath nonlinearities compensate strongly and the dc self-bias vanishes, whereas geometrical or electrical asymmetry breaks this compensation and enhances harmonic generation and plasma-series-resonance oscillations.

physics.plasm-ph↗

Dynamics of reactive oxygen species produced by the COST microplasma jet

This study is focused on measuring the densities of the excited molecular oxygen species, O$_{2}(\text{a}^{1}Δ_{\text{g}})$ and O$_{2}(\text{b}^{1}Σ_{\text{g}}^{+})$, produced in a COST atmospheric pressure plasma jet using a helium-oxygen mixture. Knowledge of the ozone density is critical for measurements because of its high quenching rate of these species. Additionally O$_{2}(\text{a}^{1}Δ_{\text{g}})$ is difficult to measure, due to its low emission intensity and sensitivity to background interference in the plasma region. Therefore a flow cell was used to enhance signal detection in the effluent region. To validate the measurements and improve understanding of reaction mechanisms, results were compared with two simulation models: a pseudo-1D plug flow simulation and a 2D fluid simulation. The plug flow simulation provided an effective means for estimating species densities, with a fast computation time. The 2D simulation offered a more realistic description of the flow dynamics, which proved critical to correctly describe the experimental trends. However, it requires long computation times to reach an equilibrium state in the flow cell. Otherwise, it leads to discrepancies to the experimental data. Further discrepancies arose, from an overestimation of the ozone density from the models, as validated from the O$_{2}(\text{b}^{1}Σ_{\text{g}}^{+})$ density measurements. Optimizing the reaction rate coefficients for the effluent region might improve the agreement with the experimental results. Despite these limitations both simulations aligned reasonably well with experimental data, showcasing the well validated plasma chemistry of the models, even for complicated effluent geometries.

physics.plasm-ph↗

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

A thorough understanding of the energy transfer mechanism from the electric field to electrons is of utmost importance for optimization and control of different plasma sources and processes. This mechanism, called electron power absorption, involves complex electron dynamics in electronegative capacitively coupled plasmas (CCPs) at low pressures, that are still not fully understood. Therefore, we present a spatio-temporally resolved analysis of electron power absorption in low pressure oxygen CCPs based on the momentum balance equation derived from the Boltzmann equation. Data are obtained from 1d3v Particle-In-Cell / Monte Carlo Collision simulations. In contrast to conventional theoretical models, which predict 'stochastic/collisionless heating' to be important at low pressure, we observe the dominance of Ohmic power absorption. In addition, there is an attenuation of ambipolar power absorption at low pressures due to the strong electronegativity, and the presence of electropositive edge regions in the discharge, which cause a high degree of temporal symmetry of the electron temperature within the RF period.

physics.plasm-ph↗