Absolute Calibration of a Broadband Transmission Grating Spectrometer from 5 to 400 nm with Uncertainty Estimates
We present the absolute calibration of a transmission grating spectrometer (TGS) with uncertainty estimates in the 5--400 nm range using synchrotron radiation at the BEAR beamline at Elettra light source in Trieste, Italy. Firstly, the spectral responsivity of a Si photodiode in the spectrometer was absolutely calibrated with respect to the absolutely-calibrated beamline photodiode. Subsequently, this photodiode was used to calibrate the transmittance of Zr and Al thin-film filters, along with bulk MgF$_2$ and UV-grade fused silica windows at their operating positions in the spectrometer to minimize mounting-induced uncertainties. Next, the quantum efficiency of the spectrometer's CCD camera was calibrated over the 5--400 nm range. Lastly, three gratings with line densities of 10000, 3000, and 1000 lines/mm were calibrated for spectroscopy in the ranges extending from soft X-ray to extreme-, vacuum- and deep-ultraviolet (DUV) wavelengths, respectively. The combination of various filters and gratings enables absolutely calibrated spectroscopy with high versatility across a broad wavelength range from soft X-rays to DUV.