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M. Wind

Publications and source records attributed to M. Wind.

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Recursive Learning of Feedforward and Compliance Compensation Parameters for Precision Motion Systems

To meet the stringent requirements of future motion systems exhibiting time-varying and/or position-dependent behavior, online data must be leveraged to improve control performance. This paper presents a recursive algorithm for simultaneous learning of feedforward and compliance compensation parameters. A multivariate regression formulation is proposed that jointly estimates friction, mass, jerk, and compliance compensation parameters while mitigating parameter coupling. Experimental results on a high-tech semiconductor metrology and inspection system demonstrate an order-of-magnitude improvement in servo performance.

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Leveraging Non-Steady-State Frequency-Domain Data in Willems' Fundamental Lemma

Willems' fundamental lemma enables data-driven analysis and control by characterizing an unknown system's behavior directly in terms of measured data. In this work, we extend a recent frequency-domain variant of this result--previously limited to steady-state data--to incorporate non-steady-state data including transient phenomena. This approach eliminates the need to wait for transients to decay during data collection, significantly reducing the experiment duration. Unlike existing frequency-domain system identification methods, our approach integrates transient data without preprocessing, making it well-suited for direct data-driven analysis and control. We demonstrate its effectiveness by isolating transients in the collected data and performing FRF evaluation at arbitrary frequencies in a numerical case study including noise.

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