Muharrem Bayraktar | Searcharxiv

arXiv2026

Adaptive Substrate Support Based on Thin-Film Piezoelectric Actuators

Advanced lithography scanners require extreme substrate flatness in the range of nanometers to prevent focus errors. Such a flatness is challenging to reach and maintain using static substrate supports. Active correction concepts using bulk piezoelectric or linear actuators become prohibitive due to wiring and volume limitations, considering the thousands of pillars required. In this work, we present to our knowledge the first ever demonstration of an active substrate support concept based on thin-film piezoelectric actuators. The working principle, fabrication steps, and characterization of a proof-of-principle device, supported by finite element modeling (FEM), are presented in detail. The fabricated device shows a displacement above 9 nm, which is sufficient to correct some of the focus errors in lithography systems. We foresee that this new concept may open the way towards smaller chip dimensions and improved yield.

cond-mat.mtrl-sci↗

arXiv2016

Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates

Renewed interest has been witnessed in utilizing the piezoelectric response of $PbZr_{0.52}Ti_{0.48}O_{3}$ (PZT) films on glass substrates for applications such as data storage and adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response. However, thin film piezoelectric response is significantly reduced compared to intrinsic response due to substrate induced clamping, even when films are well-oriented. Here, a novel method is presented to grow preferentially (100)-oriented PZT films on glass substrates by utilizing crystalline nanosheets as seed layers. Furthermore, increasing the repetition frequency up to 20 Hz during pulsed laser deposition helps to tune the film microstructure to hierarchically ordered columns that leads to reduced clamping and enhanced piezoelectric response evidenced by transmission electron microscopy and analytical calculations. A large piezoelectric response of 280 pm/V is observed in optimally tuned structure which almost triples the highest reported piezoelectric response on glass. To confirm that the clamping compromises the piezoelectric response, denser films are deposited using a lower repetition frequency and a $BiFeO_{3}$ buffer layer resulting in significantly reduced piezoelectric responses. This paper demonstrates a novel method for PZT integration on glass substrates without compromising the large piezoelectric response.

cond-mat.mtrl-sci↗